Air Pressure Active Micro-Vibration Control System "α Series"
Possible from 3 points to multi-point support! Micro-vibration control technology tailored to the specifications and requirements of the equipment.
The "α Series" is a pneumatic active micro-vibration control system that brings together the essence of micro-vibration control technology. As semiconductors and liquid crystals become increasingly miniaturized, there is a transition towards higher precision and speed to improve production efficiency, where technology that can quickly eliminate large direct disturbances is required. This product meets such market demands and possesses excellent vibration isolation performance, control performance, and recovery performance. 【Features】 ■ Excellent vibration isolation characteristics ■ Fast settling time and accurate position control ■ High durability *For more details, please refer to the PDF materials or feel free to contact us.
- 企業：特許機器
- 価格：Other
